CNF25. MEMS : Fabrication and characterization of microcantilevers

Research output: Other contribution

Abstract

Microelectromechanical systems (MEMS) technologies can be used to produce from the simplest structures to the most complex devices and systems. Due to their many applications in various fields, MEMS have turned into one of the most researched areas in microtechnology.
Original languageUnknown
Volume1
Publication statusPublished - Sep 2014

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