TY - JOUR
T1 - Characterization of nanocrystalline silicon carbide films
AU - Zhang, S
AU - Pereira, Luis Miguel Nunes
AU - Hu, Z.
AU - Raniero, Leandro
AU - Fortunato, Elvira Maria Correia
AU - Ferreira, Isabel
AU - Martins, Rodrigo Ferrão de Paiva
PY - 2006/6/15
Y1 - 2006/6/15
N2 - Amorphous silicon carbide films were obtained by plasma enhanced chemical vapor deposition (PECVD) technique using a gas mixture of silane, methane, and hydrogen with a high excitation frequency and a high hydrogen dilution ratio. The high temperature annealing behavior of the amorphous silicon carbide films was studied by annealing at 1373 K for 1 h in nitrogen atmosphere. A very thin Au film was deposited on part of the films to investigate the metal induced crystallization effect. Well aligned nanotubes were found on the silicon carbide films covered by a thin gold layer after the high temperature annealing by atomic force microscopy. Further study is necessary to identify the nature of the nanotubes and elucidate their growth mechanism.
AB - Amorphous silicon carbide films were obtained by plasma enhanced chemical vapor deposition (PECVD) technique using a gas mixture of silane, methane, and hydrogen with a high excitation frequency and a high hydrogen dilution ratio. The high temperature annealing behavior of the amorphous silicon carbide films was studied by annealing at 1373 K for 1 h in nitrogen atmosphere. A very thin Au film was deposited on part of the films to investigate the metal induced crystallization effect. Well aligned nanotubes were found on the silicon carbide films covered by a thin gold layer after the high temperature annealing by atomic force microscopy. Further study is necessary to identify the nature of the nanotubes and elucidate their growth mechanism.
KW - quantum wells
KW - chemical vapor deposition
KW - Rutherford backscattering
KW - X-ray diffraction
KW - nanocrystals
KW - carbon-based and nanotubes
KW - FT-IR measurements
KW - atomic force and scanning tunneling microscopy
KW - wires and dots
U2 - 10.1016/j.jnoncrysol.2006.02.027
DO - 10.1016/j.jnoncrysol.2006.02.027
M3 - Article
VL - 352
SP - 1410
EP - 1415
JO - Journal of Non-Crystalline Solids
JF - Journal of Non-Crystalline Solids
SN - 0022-3093
IS - 9-20
ER -