Characterization of aluminium doped zinc oxide thin films deposited on polymeric substrates

E. Fortunato, P. Nunes, D. Costa, D. Brida, I. Ferreira, R. Martins

Research output: Contribution to journalArticle

51 Citations (Scopus)

Abstract

We report, for the first time, results on transparent ZnO:Al thin films deposited on polyester (Mylar type D, 100 μm thickness) substrates at room temperature by magnetron sputtering. The structural, optical and electrical properties of the deposited films have been studied. The samples are polycrystalline with a hexagonal wurtzite structure and a strong crystallographic c-axis orientation (0 0 2) perpendicular to the substrate surface. The ZnO:Al thin films with 83% transmittance in the visible region and a resistivity as low as 3.6 × 10-2 Ωcm have been obtained, as deposited. The obtained results are comparable to those obtained on glass substrates, opening a new field of low cost, light weight, small volume, flexible and unbreakable large area optoelectronic devices.

Original languageEnglish
Pages (from-to)233-236
Number of pages4
JournalVacuum
Volume64
Issue number3-4
DOIs
Publication statusPublished - Jan 2002

Keywords

  • Magnetron sputtering
  • Mylar
  • Polyester
  • Thin film
  • Zinc oxide

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