Characteristics of a linear array of a-Si: H thin film position sensitive detector

E. Fortunato, F. Soares, P. Teodoro, N. Guimarães, M. Mendes, H. Águas, V. Silva, R. Martins

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1 Citation (Scopus)


The increasing demand in automation processes in finishing techniques also calls for automatic measurement and inspection methods. These methods ought to be installed as close as possible to the production process and they ought to measure the values needed in a safe and fast way, without disturbing the process itself. Simultaneously they should be free of wear and insensitive against mechanical perturbations. This approach can be reached by proper combination of the laser triangulation technique with an array of linear position sensitive detectors, able to supply information about the surface finishing of an object. This is the aim of this paper that envisages to present experimental results of the performances exhibited by such an array constituting 128 elements. The analogue information supplied by this array is processed by an analogue/digital converter, directly coupled to the array and whose information is computer processed, concerning the recognition of patterns and the processing of information collected over the object to be inspected.

Original languageEnglish
Pages (from-to)222-225
Number of pages4
JournalThin Solid Films
Issue number1-2
Publication statusPublished - 11 Jan 1999


  • Amorphous silicon
  • Devices
  • Position sensors
  • Thin films


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