Blue-enhanced thin-film photodiode for dual-screen x-ray imaging

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Abstract

This article reports on a-Si:H-based low-leakage blue-enhanced photodiodes for dual-screen x-ray imaging detectors. Doped nanocrystalline silicon was incorporated in both the n- and p-type regions to reduce absorption losses for light incoming from the top and bottom screens. The photodiode exhibits a dark current density of 900 pA/cm(2) and an external quantum efficiency up to 90% at a reverse bias of 5 V. In the case of illumination through the tailored p-layer, the quantum efficiency of 60% at a 400 nm wavelength is almost double that for the conventional a-Si:H n-i-p photodiode.
Original languageUnknown
Pages (from-to)263505
JournalApplied Physics Letters
Volume95
Issue number26
DOIs
Publication statusPublished - 1 Jan 2009

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