Automated rf-PERTE System for Room Temperature Deposition of TCO Coatings

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)
4 Downloads (Pure)

Abstract

In this work we present a fully automated plasma-enhanced reactive thermal evaporation system (rf-PERTE) that can be used for the deposition of transparent metal oxide films without intentional heating of the substrate. The system and developed software enables the full control over critical deposition conditions such as mass flow of oxygen, process pressure, current flowing through crucible and rf-power. These parameters are automatically adjusted during the deposition thus keeping them in a narrow process window. This way, highly transparent and conductive coating can be deposited with a high degree of reproducibility of the optical and electrical characteristics. The resistivity of 9×10-4 Ω-cm and the peak transmittance of 90% in the visible spectral range were achieved for indium oxide films deposited on glass substrates. This technique is also suitable for the deposition of transparent conducting coatings in a wide range of plastic materials for flexible solar cells. In particular, we have successfully deposited indium oxide on PEN (polyethylene naphthalate) sheets with electrical and optical properties approaching the ones for films on glass.

Original languageEnglish
Title of host publicationProceedings of the 2016 E-MRS Spring Meeting Symposium T - Advanced Materials and Characterization Techniques for Solar Cells III
EditorsS. Yerci, I. Crupi, I. Gordon, A. Fejfar, K. Catchpole
Place of PublicationAmsterdam
PublisherELSEVIER SCIENCE BV
Pages96-101
Number of pages6
DOIs
Publication statusPublished - 2016

Publication series

NameEnergy Procedia
PublisherElsevier Science B.V., Amsterdam.
Volume102
ISSN (Print)1876-6102

Fingerprint

Coatings
Indium
Oxide films
Glass
Temperature
Thermal evaporation
Crucibles
Substrates
Polyethylenes
Solar cells
Electric properties
Optical properties
Plastics
Plasmas
Heating
Oxides
Oxygen
Metals

Keywords

  • deposition technique
  • thin solid films
  • transparent conducting oxides

Cite this

Fernandes, M., Vygranenko, Y., Vieira, M. M. D. A. C., Lavareda, G., Carvalho, C. N. D., & Amaral, A. (2016). Automated rf-PERTE System for Room Temperature Deposition of TCO Coatings. In S. Yerci, I. Crupi, I. Gordon, A. Fejfar, & K. Catchpole (Eds.), Proceedings of the 2016 E-MRS Spring Meeting Symposium T - Advanced Materials and Characterization Techniques for Solar Cells III (pp. 96-101). (Energy Procedia; Vol. 102). Amsterdam: ELSEVIER SCIENCE BV. https://doi.org/10.1016/j.egypro.2016.11.323
Fernandes, M. ; Vygranenko, Y. ; Vieira, Maria Manuela de Almeida Carvalho ; Lavareda, G. ; Carvalho, C. Nunes De ; Amaral, A. / Automated rf-PERTE System for Room Temperature Deposition of TCO Coatings. Proceedings of the 2016 E-MRS Spring Meeting Symposium T - Advanced Materials and Characterization Techniques for Solar Cells III. editor / S. Yerci ; I. Crupi ; I. Gordon ; A. Fejfar ; K. Catchpole. Amsterdam : ELSEVIER SCIENCE BV, 2016. pp. 96-101 (Energy Procedia).
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title = "Automated rf-PERTE System for Room Temperature Deposition of TCO Coatings",
abstract = "In this work we present a fully automated plasma-enhanced reactive thermal evaporation system (rf-PERTE) that can be used for the deposition of transparent metal oxide films without intentional heating of the substrate. The system and developed software enables the full control over critical deposition conditions such as mass flow of oxygen, process pressure, current flowing through crucible and rf-power. These parameters are automatically adjusted during the deposition thus keeping them in a narrow process window. This way, highly transparent and conductive coating can be deposited with a high degree of reproducibility of the optical and electrical characteristics. The resistivity of 9×10-4 Ω-cm and the peak transmittance of 90{\%} in the visible spectral range were achieved for indium oxide films deposited on glass substrates. This technique is also suitable for the deposition of transparent conducting coatings in a wide range of plastic materials for flexible solar cells. In particular, we have successfully deposited indium oxide on PEN (polyethylene naphthalate) sheets with electrical and optical properties approaching the ones for films on glass.",
keywords = "deposition technique, thin solid films, transparent conducting oxides",
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note = "The authors are grateful to the Portuguese Foundation of Science and Technology through fellowship SFRH/BPD/102217/2014 for financial support of this research.",
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language = "English",
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Fernandes, M, Vygranenko, Y, Vieira, MMDAC, Lavareda, G, Carvalho, CND & Amaral, A 2016, Automated rf-PERTE System for Room Temperature Deposition of TCO Coatings. in S Yerci, I Crupi, I Gordon, A Fejfar & K Catchpole (eds), Proceedings of the 2016 E-MRS Spring Meeting Symposium T - Advanced Materials and Characterization Techniques for Solar Cells III. Energy Procedia, vol. 102, ELSEVIER SCIENCE BV, Amsterdam, pp. 96-101. https://doi.org/10.1016/j.egypro.2016.11.323

Automated rf-PERTE System for Room Temperature Deposition of TCO Coatings. / Fernandes, M.; Vygranenko, Y.; Vieira, Maria Manuela de Almeida Carvalho; Lavareda, G.; Carvalho, C. Nunes De; Amaral, A.

Proceedings of the 2016 E-MRS Spring Meeting Symposium T - Advanced Materials and Characterization Techniques for Solar Cells III. ed. / S. Yerci; I. Crupi; I. Gordon; A. Fejfar; K. Catchpole. Amsterdam : ELSEVIER SCIENCE BV, 2016. p. 96-101 (Energy Procedia; Vol. 102).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Automated rf-PERTE System for Room Temperature Deposition of TCO Coatings

AU - Fernandes, M.

AU - Vygranenko, Y.

AU - Vieira, Maria Manuela de Almeida Carvalho

AU - Lavareda, G.

AU - Carvalho, C. Nunes De

AU - Amaral, A.

N1 - The authors are grateful to the Portuguese Foundation of Science and Technology through fellowship SFRH/BPD/102217/2014 for financial support of this research.

PY - 2016

Y1 - 2016

N2 - In this work we present a fully automated plasma-enhanced reactive thermal evaporation system (rf-PERTE) that can be used for the deposition of transparent metal oxide films without intentional heating of the substrate. The system and developed software enables the full control over critical deposition conditions such as mass flow of oxygen, process pressure, current flowing through crucible and rf-power. These parameters are automatically adjusted during the deposition thus keeping them in a narrow process window. This way, highly transparent and conductive coating can be deposited with a high degree of reproducibility of the optical and electrical characteristics. The resistivity of 9×10-4 Ω-cm and the peak transmittance of 90% in the visible spectral range were achieved for indium oxide films deposited on glass substrates. This technique is also suitable for the deposition of transparent conducting coatings in a wide range of plastic materials for flexible solar cells. In particular, we have successfully deposited indium oxide on PEN (polyethylene naphthalate) sheets with electrical and optical properties approaching the ones for films on glass.

AB - In this work we present a fully automated plasma-enhanced reactive thermal evaporation system (rf-PERTE) that can be used for the deposition of transparent metal oxide films without intentional heating of the substrate. The system and developed software enables the full control over critical deposition conditions such as mass flow of oxygen, process pressure, current flowing through crucible and rf-power. These parameters are automatically adjusted during the deposition thus keeping them in a narrow process window. This way, highly transparent and conductive coating can be deposited with a high degree of reproducibility of the optical and electrical characteristics. The resistivity of 9×10-4 Ω-cm and the peak transmittance of 90% in the visible spectral range were achieved for indium oxide films deposited on glass substrates. This technique is also suitable for the deposition of transparent conducting coatings in a wide range of plastic materials for flexible solar cells. In particular, we have successfully deposited indium oxide on PEN (polyethylene naphthalate) sheets with electrical and optical properties approaching the ones for films on glass.

KW - deposition technique

KW - thin solid films

KW - transparent conducting oxides

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U2 - 10.1016/j.egypro.2016.11.323

DO - 10.1016/j.egypro.2016.11.323

M3 - Conference contribution

T3 - Energy Procedia

SP - 96

EP - 101

BT - Proceedings of the 2016 E-MRS Spring Meeting Symposium T - Advanced Materials and Characterization Techniques for Solar Cells III

A2 - Yerci, S.

A2 - Crupi, I.

A2 - Gordon, I.

A2 - Fejfar, A.

A2 - Catchpole, K.

PB - ELSEVIER SCIENCE BV

CY - Amsterdam

ER -

Fernandes M, Vygranenko Y, Vieira MMDAC, Lavareda G, Carvalho CND, Amaral A. Automated rf-PERTE System for Room Temperature Deposition of TCO Coatings. In Yerci S, Crupi I, Gordon I, Fejfar A, Catchpole K, editors, Proceedings of the 2016 E-MRS Spring Meeting Symposium T - Advanced Materials and Characterization Techniques for Solar Cells III. Amsterdam: ELSEVIER SCIENCE BV. 2016. p. 96-101. (Energy Procedia). https://doi.org/10.1016/j.egypro.2016.11.323