Automated rf-PERTE System for Room Temperature Deposition of TCO Coatings

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In this work we present a fully automated plasma-enhanced reactive thermal evaporation system (rf-PERTE) that can be used for the deposition of transparent metal oxide films without intentional heating of the substrate. The system and developed software enables the full control over critical deposition conditions such as mass flow of oxygen, process pressure, current flowing through crucible and rf-power. These parameters are automatically adjusted during the deposition thus keeping them in a narrow process window. This way, highly transparent and conductive coating can be deposited with a high degree of reproducibility of the optical and electrical characteristics. The resistivity of 9×10-4 Ω-cm and the peak transmittance of 90% in the visible spectral range were achieved for indium oxide films deposited on glass substrates. This technique is also suitable for the deposition of transparent conducting coatings in a wide range of plastic materials for flexible solar cells. In particular, we have successfully deposited indium oxide on PEN (polyethylene naphthalate) sheets with electrical and optical properties approaching the ones for films on glass.

Original languageEnglish
Title of host publicationProceedings of the 2016 E-MRS Spring Meeting Symposium T - Advanced Materials and Characterization Techniques for Solar Cells III
EditorsS. Yerci, I. Crupi, I. Gordon, A. Fejfar, K. Catchpole
Place of PublicationAmsterdam
Number of pages6
Publication statusPublished - 2016

Publication series

NameEnergy Procedia
PublisherElsevier Science B.V., Amsterdam.
ISSN (Print)1876-6102


  • deposition technique
  • thin solid films
  • transparent conducting oxides


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