Atom probe mass spectrometry

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A brief review of the stages of the evolution and the current status of atom-probe techniques with a special emphasis on 3D tomography with laser-assisted field evaporation is provided. The sample preparation is discussed; the results of the investigation of metals, alloys, semiconductor structures and dielectric layers, and organic materials are presented. Because of the high spatial resolution (0.1-0.3 nm in all three directions) and excellent compositional sensitivity (better than 10(-3) at %), atom probes hold much promise in nanotechnology.
Original languageUnknown
Pages (from-to)1311-1319
JournalJournal Of Analytical Chemistry
Issue number13
Publication statusPublished - 1 Jan 2010

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