Aqueous Combustion Synthesis of Aluminum Oxide Thin Films and Application as Gate Dielectric in GZTO Solution-based TFTs

Engineering & Materials Science

• Combustion synthesis 100%
• Gate dielectrics 95%
• Gallium 95%
• Tin oxides 92%
• Zinc oxide 88%
• Thin film transistors 85%
• Oxide films 83%
• Aluminum oxide 64%
• Thin films 63%
• Semiconductor materials 29%
• Water 18%
• Permittivity 16%
• Vacuum 14%
• Oxides 14%
• Capacitance 14%
• Transistors 14%
• Costs 6%

Chemistry

• Combustion Synthesis 77%
• Dielectric Material 59%
• Oxide 36%
• Semiconductor 34%
• Permittivity 24%
• Application 21%
• Vacuum 17%
• Compound Mobility 17%
• Amorphous Material 15%
• Green 15%
• Solvent 10%