Abstract

In this paper we present results of PIN single and dual axis Thin Film Position Sensitive Detectors (TFPSD) based on hydrogenated amorphous silicon (a-Si:H) technology, with a wide detection area (up to 80 × 80 mm). These sensors provide an alternative to Charge Coupled Devices (CCDs) when large inspection areas are needed, under a requirement to use simpler technology. In this paper we analyse the forward and reverse I-V characteristics in the dark and under illumination, as well as the device linearity of TFPSD.

Original languageEnglish
Pages (from-to)1151-1154
Number of pages4
JournalVacuum
Volume45
Issue number10-11
DOIs
Publication statusPublished - 1994

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