ZnO films were grown by atmospheric metal-organic chemical vapour deposition and annealed at 900 degrees C in an. oxygen environment. The annealing properties of the films have been characterized by means of x-ray diffraction, Raman scattering, Rutherford backscattering, (RBS), elastic recoil detection analysis (ERDA) and photoluminescence, spectra. The,results indicate that high crystal quality ZnO film has been obtained after annealing. The full width at half-maximum of omega rocking curves is only 369 arcsec. The Raman spectra show a strong high frequency E-2 mode peak comparable to that forlbulk ZnO. high The intensity ratio of the E-1 (LO) peak to E-2(high) peak before annealing is 0.81 and after annealing 0.75. RBS and ERDA spectra indicate that a stoichiometric ZnO film is formed and the annealing only changes the H content in the ZnO film. After annealing all emission lines become sharper, as expected, which means a higher quality film has been obtained.