Abstract
A TOF-SIMS VG Ionex IX23LS with upgraded data acquisition and control system was used to study the secondary emission of negative atomic and cluster ions of non-metallic elements (P, As and Sb) upon a 19 keV Ga + bombardment of non-degenerated III-V semiconductors (GaP, GaAs, GaSb, InP, InAs and InSb) with prior neutral Cs deposition from a getter dispenser. It was found that surface cesiation enhances the peak intensity of all negative ion species; in the case of atomic ions, the greatest increase (360) was observed for P - emitted from InP. Such an enhancement was larger for In-based than for Ga-based compounds. We explained that in terms of an electronegativity difference between the composing atoms of III-V semiconductors. The greater electronegativity difference (bond ionicity) of In-based compounds resulted in the greater Cs-induced work function decrease leading to a higher increase in the ionization probability of secondary ions.
Original language | English |
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Pages (from-to) | 2490-2497 |
Number of pages | 8 |
Journal | Applied Surface Science |
Volume | 258 |
Issue number | 7 |
DOIs | |
Publication status | Published - 15 Jan 2012 |
Keywords
- Electronegativity
- III-V semiconductors
- Neutral cesium deposition
- Secondary ion yield enhancement
- TOF-SIMS
- Work function