An indium-oxide electrode with discontinuous Au layers for plasmonic devices

Yuri Vygranenko, Guilherme Lavareda, Vânia André, Pedro Brogueira, Ana Amaral, Miguel Fernandes, Alessandro Fantoni, M. Vieira

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

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In this contribution we report on a low cost plasmonic electrode for light-sensing applications. The electrode combines a conducting nonstoichiometric indium oxide (InOx) layer with an ultrathin (∼5 nm) discontinuous Au layer. The InOx and Au layers were deposited on glass substrates by plasma enhanced reactive thermal evaporation and thermal evaporation, respectively. Several device configurations with one or two Au layer(s) sandwiched between InOx layers were fabricated and characterized. The morphological and structural properties of both Au and InOx layers were analyzed using AFM and XRD techniques. In particular, the effect of thermal annealing (673 K, 15 min) on the surface morphology of Au layers grown on bare glass and InOx-coated substrate was investigated. It has been also found that the oxide film grown above an underlying nanostructured Au layer is amorphous, while a reference InOx film on glass is nanocrystalline with a smooth surface. The electrical properties of InOx grown on the Au surface are worsened due to Au-induced structural disorder. The observed difference in transmission spectra of the glass/InOx/Au and glass/Au/InOx structures indicates the difference in the morphology of the metal layer. Thus, the optical and morphological properties of the InOxelectrode can be varied in a wide range by incorporating several Au layers.

Original languageEnglish
Title of host publicationOxide-based Materials and Devices XI
EditorsDavid J. Rogers, David C. Look, Ferechteh H. Teherani
PublisherSPIE-International Society for Optical Engineering
ISBN (Electronic)9781510633254
Publication statusPublished - 2020
EventOxide-based Materials and Devices XI 2020 - San Francisco, United States
Duration: 3 Feb 20206 Feb 2020

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
PublisherSPIE - International Society for Optical Engineering
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X


ConferenceOxide-based Materials and Devices XI 2020
Country/TerritoryUnited States
CitySan Francisco


  • Indium oxide
  • Localized surface plasmons
  • Nanostructured gold film
  • Plasmonics
  • Reactive thermal evaporation


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