AMORPHOUS MULTICOMPONENT DIELECTRIC BASED ON THE MIXTURE OF HIGH BAND GAP AND HIGH K MATERIALS, RESPECTIVE DEVICES AND MANUFACTURE

Gonçalo Pedro Gonçalves (Inventor), Danjela Kuscer Hrovatin (Inventor), Marija Kosec (Inventor), Pedro Miguel Cândido Barquinha (Inventor), E. Fortunato (Inventor), Rodrigo Martins (Inventor)

Research output: PatentInternational PCT application

Abstract

High performance thin-film, transistors are entirely processed at temperatures not exceeding 150° C., using amorphous multi component dielectrics based on the mixture of high band gap and high dielectric constant (K) materials. The sputtered or ink jet printed mixed dielectric materials such as Ta2O5 with SiO2 or Al2O3 or HfO2 with SiO2 or Al2O3 are used. These multicomponent dielectrics allow producing amorphous dielectrics to be introduced in high stable electronic devices with low leakage currents, while preserving a high dielectric constant. This results in producing thin film transistors with remarkable electrical properties, such as the ones produced based on Ga—In—Zn oxide as channel layers and where the dielectric was the combination of the mixture Ta2O5:SiO2, exhibiting field-effect mobility exceeding 35 cm2 V−1 s−1, close to 0 V turn-on voltage, on/off ratio higher than 106 and subthreshold slope below 0.24 V dec−1.

Original languageEnglish
Patent numberUS2012248445
IPCH01L 33/ 08 A I
Priority date5/08/10
Publication statusPublished - 4 Oct 2012

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