| Original language | English |
|---|---|
| Patent number | EP2462611 |
| IPC | H01L 21/ 316 A I |
| Priority date | 5/08/09 |
| Publication status | Published - 13 Jun 2012 |
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Rodrigo Ferrão De Paiva Martins (Inventor), Elvira Maria Correia Fortunato (Inventor), Pedro Miguel Cândido Barquinha (Inventor), Luís Miguel Nunes Pereira (Inventor), Gonçalo Pedro Gonçalves (Inventor), Danjela Kuscer Hrovatin (Inventor), Marija Kosec (Inventor)
Research output: Patent › National Final Application
| Original language | English |
|---|---|
| Patent number | EP2462611 |
| IPC | H01L 21/ 316 A I |
| Priority date | 5/08/09 |
| Publication status | Published - 13 Jun 2012 |