Absolute photo-absorption cross sections and electronic state spectroscopy of selected fluorinated hydrocarbons relevant to the plasma processing industry

Paulo Manuel Assis Loureiro Limão-vieira; Samuel Eden; Nigel J. Mason

doi:10.1016/S0969-806X(03)00278-0

Absolute photo-absorption cross sections and electronic state spectroscopy of selected fluorinated hydrocarbons relevant to the plasma processing industry

Paulo Manuel Assis Loureiro Limão-vieira, Samuel Eden, Nigel J. Mason

DF – Departamento de Física

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

Abstract

Photo-absorption cross sections have been measured for methyl iodide, CF3I (310nm>λ>110nm) and dichlorodifluoromethane, CCl2F2 (225nm>λ>110nm) using synchrotron radiation. Electron energy loss spectroscopy was also used to probe the electronic and vibronic excitation of CF3I. Electronic states have been assigned to each of the observed absorption bands incorporating both valence and Rydberg transitions. The measured VUV cross sections are used to derive the photolysis rates in the terrestrial atmosphere and hence determine the potential importance of each gas in global warming and ozone depletion.

Original language	English
Pages (from-to)	187-192
Number of pages	6
Journal	Radiation Physics and Chemistry
Volume	68
Issue number	1-2
DOIs	https://doi.org/10.1016/S0969-806X(03)00278-0
Publication status	Published - 1 Sept 2003

Keywords

Electron energy loss spectroscopy (EELS)
VUV photo-absorption
Synchrotron radiation
Plasma etching
Photolysis rates

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1016/S0969-806X(03)00278-0

Cite this

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keywords = "Electron energy loss spectroscopy (EELS), VUV photo-absorption, Synchrotron radiation, Plasma etching, Photolysis rates",

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Absolute photo-absorption cross sections and electronic state spectroscopy of selected fluorinated hydrocarbons relevant to the plasma processing industry. / Limão-vieira, Paulo Manuel Assis Loureiro; Eden, Samuel; Mason, Nigel J.
In: Radiation Physics and Chemistry, Vol. 68, No. 1-2, 01.09.2003, p. 187-192.

Research output: Contribution to journal › Article › peer-review

TY - JOUR

T1 - Absolute photo-absorption cross sections and electronic state spectroscopy of selected fluorinated hydrocarbons relevant to the plasma processing industry

AU - Limão-vieira, Paulo Manuel Assis Loureiro

AU - Eden, Samuel

AU - Mason, Nigel J.

PY - 2003/9/1

Y1 - 2003/9/1

N2 - Photo-absorption cross sections have been measured for methyl iodide, CF3I (310nm>λ>110nm) and dichlorodifluoromethane, CCl2F2 (225nm>λ>110nm) using synchrotron radiation. Electron energy loss spectroscopy was also used to probe the electronic and vibronic excitation of CF3I. Electronic states have been assigned to each of the observed absorption bands incorporating both valence and Rydberg transitions. The measured VUV cross sections are used to derive the photolysis rates in the terrestrial atmosphere and hence determine the potential importance of each gas in global warming and ozone depletion.

AB - Photo-absorption cross sections have been measured for methyl iodide, CF3I (310nm>λ>110nm) and dichlorodifluoromethane, CCl2F2 (225nm>λ>110nm) using synchrotron radiation. Electron energy loss spectroscopy was also used to probe the electronic and vibronic excitation of CF3I. Electronic states have been assigned to each of the observed absorption bands incorporating both valence and Rydberg transitions. The measured VUV cross sections are used to derive the photolysis rates in the terrestrial atmosphere and hence determine the potential importance of each gas in global warming and ozone depletion.

KW - Electron energy loss spectroscopy (EELS)

KW - VUV photo-absorption

KW - Synchrotron radiation

KW - Plasma etching

KW - Photolysis rates

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DO - 10.1016/S0969-806X(03)00278-0

M3 - Article

SN - 0969-806X

VL - 68

SP - 187

EP - 192

JO - Radiation Physics and Chemistry

JF - Radiation Physics and Chemistry

IS - 1-2

ER -

Absolute photo-absorption cross sections and electronic state spectroscopy of selected fluorinated hydrocarbons relevant to the plasma processing industry

Abstract

Keywords

UN SDGs

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