A review on hot cathode ionisation gauges with focus on a suitable design for measurement accuracy and stability

Karl Jousten, Frederic Boineau, Nenad Bundaleski, Claus Illgen, Janez Setina, Orlando M. N. D. Teodoro, Martin Vicar, Martin Wüest

Research output: Contribution to journalReview articlepeer-review

6 Citations (Scopus)
6 Downloads (Pure)

Abstract

A literature review starting from 1950 is given on the design and geometry of ionisation gauge types with hot cathodes. Considerations on the material of the electrodes and of surface effects are included. The review focuses on the design issues for measurement accuracy, linearity, repeatability, reproducibility, and stability of sensitivity. Also, the attempts to reduce the lower measurement limit are reviewed to some extent.

Original languageEnglish
Article number109545
JournalVacuum
Volume179
DOIs
Publication statusPublished - Sep 2020

Keywords

  • Electron stimulated desorption
  • Hot cathode
  • Ionisation gauge
  • Secondary electrons
  • Sensitivity

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