A linear array thin film position sensitive detector for 3D measurements

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Abstract

A novel compact linear thin film position sensitive detector with 128 elements, based on p-i-n a-Si:H devices was developed. The proper incorporation of this sensor into an optical inspection camera makes possible the acquisition of three dimension information of an object, using laser triangulation methods. The main advantages of this system, when compared with the conventional charge-coupled devices, are the low complexity of hardware and software used and that the information can be continuously processed (analogue detection).

Original languageEnglish
Pages (from-to)1212-1216
Number of pages5
JournalJournal of Non-Crystalline Solids
Volume198-200
Issue numberPART 2
DOIs
Publication statusPublished - May 1996

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