32 Linear array position sensitive detector based on NIP and hetero a-Si: H microdevices

R. Martins, J. Figueiredo, V. Silva, H. Águas, F. Soares, A. Marques, I. Ferreira, E. Fortunato

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

In this paper we present results concerning the performance exhibited by an integrated array of 32 one-dimensional amorphous silicon thin film position sensitive detectors based on nip and hetero amorphous silicon structures, with a total active area size below 1 cm2 linearity, its spatial resolution and response time, that make it one of the most interesting analog detector to be used in unmanned optical inspection control systems where a continuous detection process is required. This opens a wide range of applications for amorphous silicon devices in the area of image processing.

Original languageEnglish
Pages (from-to)1283-1288
Number of pages6
JournalJournal of Non-Crystalline Solids
Volume299-302
Issue numberPART 2
DOIs
Publication statusPublished - Apr 2002

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