Barros, A. R. X.,
Correia, N. F.,
Barquinha, P. M. C.,
Figueiredo, V. M. L.,
Park, S. H.,
Hwang, C. S.,
Byun, C. W.,
Fortunato, E. M. C. &
Martins, R.,
20 Oct 2011, IPC No. H01L 29/ 22 A I, Patent No. US2011253997, Priority date
15 Apr 2010, Priority No. KR20100034881
Research output: Patent › International PCT application